MADE IN JAPAN

Đặc điểm

• In a Gaede-type vacuum pump, the rotating parts are lubricated and vacuum-sealed by vacuum pump oil, ensuring a stable high vacuum.
• Because it is a direct-drive motor type, it can achieve a small size and high exhaust speed compared to a belt-driven system due to its high-speed rotation.
• A two-stage system achieves a better vacuum than a single-stage system through two intake, compression, and exhaust cycles.

Ứng dụng

• For use in physical and chemical experiments, analytical instruments, and laser application equipment.
• Vacuum pumping systems, backings for electron microscopes.
• Semiconductor manufacturing equipment.
• Vacuum deposition equipment, freeze dryers.
• Medical equipment in general.

Thông số chi tiết

• Custom-made versions available for different voltages, even for single units.
• Exhaust speed 50/60Hz (L/min): 5/6
• Intake pipe diameter (mm): ODφ12×IDφ6
• Maximum dimensions (mm): 130(W)×203(L)×159.5(H)
• Exhaust speed (L/min) 50/60Hz: 5/6
• Ultimate pressure (Pa): 6.7
• Power supply (V): Single-phase 100
• Overall width (mm): 130
• Overall length (mm): 203
• Overall height (mm): 159.5
• Intake port diameter (mm): 12
• Lubricant used: SMR-100
• Power cord length (m): 1.8

ULVAC G-5DA